9200 Series Mini-Meg Generator

9200 Series Mini-Meg Generator

Megasonic performance starts with the generator and not all generators are created equal. Simply put, PCT offers the most versatile and fully featured megasonic generators on the market. PCT has pioneered and developed the leading megasonic technology available in the global market with numerous patents and pending applications. Customers around the world have come to depend on PCT for the highest quality and performance megasonic systems today. With the development of super fine geometries with more fragile structures and substrates, customers need more process development options than ever before to be successful, productive and profitable. HyperClean™ incorporates PCT’s unique energy-transfer technology for superior submicron cleaning, reduced operating costs and high reliability.

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The Mini-Meg Lab System is designed for organizations looking to get better value from their equipment budgets. Mini-Meg is a fully functional megasonic system with the portability to allow it to be used in a fume hood or mounted on a small wet bench. Just as with fully featured megasonic systems, virtually any megasonic action can be tested with Mini-Meg and it comes with the following features:

  • Independent Power & Frequency Control for each RF Output
  • 2 Independent Channels with 2 outputs per Channel
  • Programmable RF Output Range up to 500 Watts per Channel
  • Programmable Up to 8 Step Changes per Channel
  • Active Phase Shifting for Three-Dimensional Control of Megasonic Energy
  • Individually Configurable and Tunable for Optimum Process Results
  • Synchronized or Individual Control of Each Channel
  • Multiple Frequency Bands Individually Controlled
  • Patented Multiplexing for On/Off Control of Individual Transducers
  • Process Variables and Real Time Data Monitoring
  • Available with choice of one frequency:
    • 450 kHz
    • 750 kHz
    • 950 kHz

Mini-Meg Product Features

GENERATOR
• Small Size
• 2 Channels
• 2 Outputs / Channels
• 500 watts/channel
• Phase Shifting
• Programmable Recipes
• Choice of Frequency
PVDF: 450kHz, 750kHz, 950kHz
Stainless Steel: 450kHz, 950kHz
Quartz: 750kHz or 1MHz

PROCESS TANK
• PVDF (Base Model)
• Tank Options
• Quartz
• Stainless Steel
• Manual Drain

TRANSDUCER
• Teflon Coated
• Ambient to 70°C Liquids
• Multiplexing / Full On

PCT Mini-Meg Specifications

Model 9200 Mini-Meg Generator
Mechanical Specifications

SizeWidth 12.5”, Length 14.0”, Height 3.5”
Material of ConstructionAnodized Aluminum
MountingHorizontal or Vertical

Electrical Specifications

Voltage Rating208-240 VAC, 50/60 Hz
Current RatingMax 10 amps
Environmental Operating Range0° to 27°C
Storage Temperature Range-25° to 50°C

Megasonic Amplifier Operation Specifications

Independent Power & Frequency Control for each RF Output
Number of Channels2
Number of Outputs per Channel2
Maximum RF Output per Channel500 watts
Maximum RF Output per Unit1000 watts
Programmable RF Output Range0 to 500 watts per Channel
Programmable Recipes / Channel8
Frequency Changes / Recipe4
RF Output Power Tolerance+/- 10%
Output DesignationsArray 1, Array 2, Array 3, Array 4
Frequency Bands (Choice of 1)PVDF: 450kHz, 750kHz, 950kHz
Stainless Steel: 450kHz, 950kHz
Quartz: 750kHz or 1MHz
Frequency Resolution100 Hz
Frequency Accuracy+/- 100 Hz
Programmable Sweep Functionality1-10 KHz
RF Output ConnectorsDB15F

External Interface

External InterlockDB15 Male Connector, +5v Loopback – Pin 10, Liquid Level – Pin 4, Ground – Pin 8, 9, 12
Communication PortsSECS II: RS232: DB15 Male connector, Receive – Pin 6 Transmit – Pin 7, Ground – Pin 8
Transducer Connections4 each DB15 Female connectors, labeled, Array 1 thru Array 4
Power Plug3 – Prong IEC Appliance Connector C14

Displays/User Interface/Data Storage

Power On/Off Switch
4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen
Monitoring for Frequency vs. Time, Power vs. Time, and more
Data Storage Capacity2 GB
Data Export1-2 psi @ 1/4 scfm

Facilities Requirements

N2 or CDA supply1-2 psi @ 1/4 scfm

Mini-Meg Tank
Base: PVDF Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 9.50” x 9.55”
6.75” x 7.50” x 5.80”
Material of ConstructionPVDF Plastic
Drain PortPVDF Drain with 1/2” Ball Valve

Optional: Stainless Steel Tank Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 10.58” x 10.51”
6.75” x 7.50” x 5.81”
Material of ConstructionElectro Polished Stainless Steel
PFA Coated Stainless (+$500)
Drain PortSS drain with 1/2” ball valve

Optional: Quartz Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 9.75” x 10.25”
5.5” x 6.50” x 5.81”
Material of ConstructionQuartz with Plastic Housing
Drain Port (Optional)Drain with 1/2” Ball Valve (+$295)