Large Capacity Mini-Meg 150

Large Capacity Mini-Meg 150

The New Mini-Meg 150 is a full production megasonic system for cleaning, process enhancement, stripping or plating that can accommodate a fully loaded common 6” (150mm) 25 wafer carrier. Whether for production or advanced research and process development , the larger capacity Mini Meg 150 has an attractive base price thousands less than competing systems.

Book a Demo

Category:
Download Data Sheet

Mini-Meg 150 Product Features

GENERATOR

  • Small Size
  • 3 Channels
  • 2 Outputs / Channels
  • 500 watts/channel
  • Phase Shifting
  • Programmable Recipes
  • Choice of Frequency
    • 450 kHz
    • 750 kHz
    • 950 kHz

PROCESS TANK

  • Tank Material Options
    • PVDF
    • Stainless Steel

TRANSDUCER

  • Teflon Coated
  • Ambient to 70°C Liquids
  • Multiplexing / Full On

Perfect for R&D Lab Applications & Processes

  • Semiconductor
  • MEMs
  • Disk Drives
  • Optics
  • LED
  • Solar
  • Particle Removal
  • Post CMP Clean
  • Batch or Single Wafer
  • Acoustic Chemical Enhancement
  • Wet Etch
  • SCI Clean
  • Resist Removal

Model 9300 Mini‐Meg Generator
Mechanical Specifications

SizeWidth 12.5”, Length 14.0”, Height 3.5”
Material of ConstructionAnodized Aluminum
MountingHorizontal or Vertical

Electrical Specifications

Voltage Rating208‐240 VAC, 50/60 Hz
Current RatingMax 10 amps
Environmental Operating Range0° to 27°C
Storage Temperature Range‐25° to 50°C

Megasonic Amplifier Operation Specifications

Independent Power & Frequency Control for each RF Output
Number of Channels3
Number of Outputs per Channel2
Maximum RF Output per Channel500 watts
Maximum RF Output per Unit1500 watts
Programmable RF Output Range0 to 500 watts per Channe
Programmable Recipes / Channel8
Frequency Changes / Recipe4
RF Output Power Tolerance+/‐ 10%
Output DesignationsArray 1, Array 2, Array 3
Frequency Bands (Choice of 1)50kHz, 750kHz, 950kHz
Frequency Resolution100 Hz
Frequency Accuracy+/‐ 100 Hz
Programmable Sweep Functionality1‐10 KHz
RF Output ConnectorsDB15F

External Interface

External InterlockDB15 Male Connector, +5v Loopback ‐ Pin 10, Liquid Level ‐ Pin 4, Ground ‐ Pin 8, 9, 12
Communication PortsSECS II: RS232: DB15 Male connector, Receive – Pin 6, Transmit – Pin 7, Ground – Pin 8
Transducer Connections4 each DB15 Female connectors, labeled, Array 1 thru Array 4
Power Plug3 ‐ prong IEC Appliance Connector C14

Displays/User Interface

Power On/Off Switch
4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen
Monitoring for Frequency vs. Time, Power vs. Time, and more

Facilities Requirements

N2 or CDA supply1‐2 psi @ 1/4 scfm

Mini‐Meg 150 Tank
PVDF Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions		Width Length Height
11.00” x 12.50” x 13.25”
9.00” x 9.00” x 8.88”
Material of ConstructionPVDF Plastic
Drain PortPVDF Drain 1/2″ NPT

Stainless Steel Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions		Width Length Height
12.50” 12.50” 10.50”
9.50” 9.50” 8.88”
Material of ConstructionElectro Polished Stainless Steel
PFA Coated Stainless (+$1,000)
Drain PortSS drain with 1/2” ball valve