Mini-Meg 150 Product Features
GENERATOR
- Small Size
- 3 Channels
- 2 Outputs / Channels
- 500 watts/channel
- Phase Shifting
- Programmable Recipes
- Choice of Frequency
• 450 kHz
• 750 kHz
• 950 kHz
PROCESS TANK
- Tank Material Options
• PVDF
• Stainless Steel
TRANSDUCER
- Teflon Coated
- Ambient to 70°C Liquids
- Multiplexing / Full On
Perfect for R&D Lab Applications & Processes
- Semiconductor
- MEMs
- Disk Drives
- Optics
- LED
- Solar
- Particle Removal
- Post CMP Clean
- Batch or Single Wafer
- Acoustic Chemical Enhancement
- Wet Etch
- SCI Clean
- Resist Removal
Model 9300 Mini‐Meg Generator
Mechanical Specifications
Size | Width 12.5”, Length 14.0”, Height 3.5” |
Material of Construction | Anodized Aluminum |
Mounting | Horizontal or Vertical |
Electrical Specifications
Voltage Rating | 208‐240 VAC, 50/60 Hz |
Current Rating | Max 10 amps |
Environmental Operating Range | 0° to 27°C |
Storage Temperature Range | ‐25° to 50°C |
Megasonic Amplifier Operation Specifications
Independent Power & Frequency Control for each RF Output | |
Number of Channels | 3 |
Number of Outputs per Channel | 2 |
Maximum RF Output per Channel | 500 watts |
Maximum RF Output per Unit | 1500 watts |
Programmable RF Output Range | 0 to 500 watts per Channe |
Programmable Recipes / Channel | 8 |
Frequency Changes / Recipe | 4 |
RF Output Power Tolerance | +/‐ 10% |
Output Designations | Array 1, Array 2, Array 3 |
Frequency Bands (Choice of 1) | 50kHz, 750kHz, 950kHz |
Frequency Resolution | 100 Hz |
Frequency Accuracy | +/‐ 100 Hz |
Programmable Sweep Functionality | 1‐10 KHz |
RF Output Connectors | DB15F |
External Interface
External Interlock | DB15 Male Connector, +5v Loopback ‐ Pin 10, Liquid Level ‐ Pin 4, Ground ‐ Pin 8, 9, 12 |
Communication Ports | SECS II: RS232: DB15 Male connector, Receive – Pin 6, Transmit – Pin 7, Ground – Pin 8 |
Transducer Connections | 4 each DB15 Female connectors, labeled, Array 1 thru Array 4 |
Power Plug | 3 ‐ prong IEC Appliance Connector C14 |
Displays/User Interface
Power On/Off Switch |
4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen Monitoring for Frequency vs. Time, Power vs. Time, and more |
Facilities Requirements
N2 or CDA supply | 1‐2 psi @ 1/4 scfm |
Mini‐Meg 150 Tank
PVDF Tank Mechanical Specifications
Size: Outside Dimensions Inside Dimensions | Width Length Height 11.00” x 12.50” x 13.25” 9.00” x 9.00” x 8.88” |
Material of Construction | PVDF Plastic |
Drain Port | PVDF Drain 1/2″ NPT |
Stainless Steel Tank Mechanical Specifications
Size: Outside Dimensions Inside Dimensions | Width Length Height 12.50” 12.50” 10.50” 9.50” 9.50” 8.88” |
Material of Construction | Electro Polished Stainless Steel PFA Coated Stainless (+$1,000) |
Drain Port | SS drain with 1/2” ball valve |