Megasonic Cleaning Systems
PCT’s Megasonic cleaning is the most advanced solution for achieving HyperClean™ semiconductor wafers available today. It has become the new standard for constant-temperature baths. PCT designed the Megasonic system with a combination of moving-beam and phase-shifting technology to make it the most efficient cleaning system — more than 90% acoustical-energy efficient. A compact, all-quartz vessel ensures superior cleanliness and high purity. The unit is stress free and operates comfortably at elevated temperatures while using fewer chemicals and saving valuable clean room space. HyperClean™ incorporates PCT’s unique energy-transfer technology in a heated all-quartz unit for superior submicron cleaning, reduced operating costs and high reliability.
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