The Original Mini-Meg 100

The Original Mini-Meg 100

The original Mini-Meg 100 Lab System was designed for organizations looking to get better value from their equipment budgets. Mini-Megs are fully functional megasonic system with the portability to allow them to be used in a fume hood or mounted on a small wet bench. Just as with fully featured megasonic systems, virtually any megasonic action can be tested with Mini-Meg. Book a Demo

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Mini-Meg 100 Product Features

GENERATOR

• Small Size
• 2 Channels
• 2 Outputs / Channels
• 350 watts/channel
• Phase Shifting
• Programmable Recipes
• Choice of Frequency
• 700 kHz
• 950 kHz

PROCESS TANK

• Tank Material Options
• PVDF
• Stainless Steel

TRANSDUCER

• Ambient to 70°C Liquids
• Multiplexing / Full On

Perfect for R&D Lab Applications & Processes

• Semiconductor
• MEMs
• Disk Drives
• Optics

  • Solar
  • Particle Removal
  • Post CMP Clean
  • 2D Graphene Particles

• Wet Etch
• SCI Clean
• Resist Removal

Model 6000 Mini‐Meg Generator
Mechanical Specifications

SizeWidth 14.0”, Length 14.0”, Height 5.0”
Material of ConstructionAnodized Aluminum
MountingHorizontal or Vertical

Electrical Specifications

Voltage Rating208‐240 VAC, 50/60 Hz
Current RatingMax 10 amps
Environmental Operating Range0° to 27°C
Storage Temperature Range‐25° to 50°C

Megasonic Amplifier Operation Specifications

Independent Power & Frequency Control for each RF Output
Number of Channels2
Number of Outputs per Channel2
Maximum RF Output per Channel350 watts
Programmable Recipes / Channel7
Frequency Changes / Recipe4
RF Output Power Tolerance+/‐ 10%
Output DesignationsArray 1, Array 2
Frequency Bands (Choice of 1)700kHz, 950kHz
Frequency Resolution100 Hz
Frequency Accuracy+/‐ 100 Hz
Programmable Sweep Functionality1‐10 KHz
RF Output ConnectorsDB15F

External Interface

External InterlockDB15 Male Connector, +5v Loopback Liquid Level
Communication PortsSECS II: RS232: DB15 Male connector
Transducer Connections4 each DB15 Female connectors
Power Plug3 ‐ prong IEC Appliance Connector

Displays/User Interface

Power On/Off Switch
4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen Monitoring for Frequency vs. Time, Power vs. Time, and more

Facilities Requirements

N2 or CDA supply1‐2 psi @ 1/4 scfm

Mini‐Meg 100 Tank
PVDF Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions		Width Length Height
8.75” x 9.50” x 9.55”
6.75” x 7.50” x 5.80”
Material of ConstructionPVDF Plastic
Drain PortPVDF Drain 1/2″ NPT

Stainless Steel Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions		Width Length Height
8.75” x 10.58” x 10.51”
6.75” x 7.50” x 5.81”
Material of ConstructionElectro Polished Stainless Steel
PFA Coated Stainless (+$500)
Drain PortSS drain with 1/2” ball valve

Quartz Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions		Width Length Height
8.75” x 9.75” x 10.25”
5.5” x 6.50” x 5.81”
Material of ConstructionQuartz with plastic housing
Drain Port (Optional)drain with 1/2” ball valve (+$295)