The Original Mini-Meg 100

The Original Mini-Meg 100

The original Mini-Meg 100 Lab System was designed for organizations looking to get better value from their equipment budgets. Mini-Megs are fully functional megasonic system with the portability to allow them to be used in a fume hood or mounted on a small wet bench. Just as with fully featured megasonic systems, virtually any megasonic action can be tested with Mini-Meg. Book a Demo

Mini-Meg 100 Product Features

GENERATOR

• Small Size
• 2 Channels
• 2 Outputs / Channels
• 500 watts/channel
• Phase Shifting
• Programmable Recipes
• Choice of Frequency
• 450 kHz
• 750 kHz
• 950 kHz

PROCESS TANK

• Tank Material Options
• PVDF
• Stainless Steel

TRANSDUCER

• Teflon Coated
• Ambient to 70°C Liquids
• Multiplexing / Full On

  Width x Length x Height
Outside Dimensions 8.75” x 9.50″ x 9.55″
Inside Dimensions 6.75” x 7.50” x 7.50”
Active Megasonic Area: 4″ x 5″
Tank Capacity 4″ (100mm) 25 wafer carrier
Tank Material Options PVDF
Stainless Steel


Generator Specifications

Number of Channels 2 Channels
Output per Channel 2 Outputs / Channel
Max RF Output / Channel 500 Watts / Channel
Max RF Output / Unit 1000 Watts
PVDF Frequency Choices 450 kHz, 750 kHz, 950 kHz
Stainless Steel Frequency Choices 450 kHz, 950 kHz


Transducer

Teflon Coated or Stainless Steel
Ambient to 70°C liquids
Multiplexing/Full On

Perfect for R&D Lab Applications & Processes

• Semiconductor
• MEMs
• Disk Drives
• Optics

• Solar
• Particle Removal
• Post CMP Clean

• Wet Etch
• SCI Clean
• Resist Removal

Model 9200 Mini‐Meg Generator
Mechanical Specifications

SizeWidth 12.5”, Length 14.0”, Height 3.5”
Material of ConstructionAnodized Aluminum
MountingHorizontal or Vertical

Electrical Specifications

Voltage Rating208‐240 VAC, 50/60 Hz
Current RatingMax 10 amps
Environmental Operating Range0° to 27°C
Storage Temperature Range‐25° to 50°C

Megasonic Amplifier Operation Specifications

Independent Power & Frequency Control for each RF Output
Number of Channels2
Number of Outputs per Channel2
Maximum RF Output per Channel500 watts
Maximum RF Output per Unit1000 watts
Programmable RF Output Range0 to 500 watts per Channel
Programmable Recipes / Channel8
Frequency Changes / Recipe4
RF Output Power Tolerance+/‐ 10%
Output DesignationsArray 1, Array 2
Frequency Bands (Choice of 1)450kHz, 750kHz, 950kHz
Frequency Resolution100 Hz
Frequency Accuracy+/‐ 100 Hz
Programmable Sweep Functionality1‐10 KHz
RF Output ConnectorsDB15F

External Interface

External InterlockDB15 Male Connector, +5v Loopback ‐ Pin 10, Liquid Level ‐ Pin 4, Ground ‐ Pin 8, 9, 12
Communication PortsSECS II: RS232: DB15 Male connector, Receive – Pin 6, Transmit – Pin 7, Ground – Pin 8
Transducer Connections4 each DB15 Female connectors, labeled, Array 1 thru Array 4
Power Plug3 ‐ prong IEC Appliance Connector C14

Displays/User Interface

Power On/Off Switch
4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen Monitoring for Frequency vs. Time, Power vs. Time, and more

Facilities Requirements

N2 or CDA supply1‐2 psi @ 1/4 scfm

Mini‐Meg 100 Tank
PVDF Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 9.50” x 9.55”
6.75” x 7.50” x 5.80”
Material of ConstructionPVDF Plastic
Drain PortPVDF Drain 1/2″ NPT

Stainless Steel Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 10.58” x 10.51”
6.75” x 7.50” x 5.81”
Material of ConstructionElectro Polished Stainless Steel
PFA Coated Stainless (+$500)
Drain PortSS drain with 1/2” ball valve

Quartz Tank Mechanical Specifications

Size:
Outside Dimensions
Inside Dimensions
Width Length Height
8.75” x 9.75” x 10.25”
5.5” x 6.50” x 5.81”
Material of ConstructionQuartz with plastic housing
Drain Port (Optional)drain with 1/2” ball valve (+$295)