Mini-Meg 100 Product Features
GENERATOR
• Small Size
• 2 Channels
• 2 Outputs / Channels
• 500 watts/channel
• Phase Shifting
• Programmable Recipes
• Choice of Frequency
• 450 kHz
• 750 kHz
• 950 kHz
PROCESS TANK
• Tank Material Options
• PVDF
• Stainless Steel
TRANSDUCER
• Teflon Coated
• Ambient to 70°C Liquids
• Multiplexing / Full On
| Width x Length x Height | |
| Outside Dimensions | 8.75” x 9.50″ x 9.55″ |
| Inside Dimensions | 6.75” x 7.50” x 7.50” |
| Active Megasonic Area: | 4″ x 5″ |
| Tank Capacity | 4″ (100mm) 25 wafer carrier |
| Tank Material Options | PVDF Stainless Steel |
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| Number of Channels | 2 Channels |
| Output per Channel | 2 Outputs / Channel |
| Max RF Output / Channel | 500 Watts / Channel |
| Max RF Output / Unit | 1000 Watts |
| PVDF Frequency Choices | 450 kHz, 750 kHz, 950 kHz |
| Stainless Steel Frequency Choices | 450 kHz, 950 kHz |
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| Teflon Coated or Stainless Steel Ambient to 70°C liquids Multiplexing/Full On |
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Perfect for R&D Lab Applications & Processes
• Semiconductor
• MEMs
• Disk Drives
• Optics
• Solar
• Particle Removal
• Post CMP Clean
• Wet Etch
• SCI Clean
• Resist Removal
Model 9200 Mini‐Meg Generator
Mechanical Specifications
| Size | Width 12.5”, Length 14.0”, Height 3.5” |
| Material of Construction | Anodized Aluminum |
| Mounting | Horizontal or Vertical |
Electrical Specifications
| Voltage Rating | 208‐240 VAC, 50/60 Hz |
| Current Rating | Max 10 amps |
| Environmental Operating Range | 0° to 27°C |
| Storage Temperature Range | ‐25° to 50°C |
Megasonic Amplifier Operation Specifications
| Independent Power & Frequency Control for each RF Output | |
| Number of Channels | 2 |
| Number of Outputs per Channel | 2 |
| Maximum RF Output per Channel | 500 watts |
| Maximum RF Output per Unit | 1000 watts |
| Programmable RF Output Range | 0 to 500 watts per Channel |
| Programmable Recipes / Channel | 8 |
| Frequency Changes / Recipe | 4 |
| RF Output Power Tolerance | +/‐ 10% |
| Output Designations | Array 1, Array 2 |
| Frequency Bands (Choice of 1) | 450kHz, 750kHz, 950kHz |
| Frequency Resolution | 100 Hz |
| Frequency Accuracy | +/‐ 100 Hz |
| Programmable Sweep Functionality | 1‐10 KHz |
| RF Output Connectors | DB15F |
External Interface
| External Interlock | DB15 Male Connector, +5v Loopback ‐ Pin 10, Liquid Level ‐ Pin 4, Ground ‐ Pin 8, 9, 12 |
| Communication Ports | SECS II: RS232: DB15 Male connector, Receive – Pin 6, Transmit – Pin 7, Ground – Pin 8 |
| Transducer Connections | 4 each DB15 Female connectors, labeled, Array 1 thru Array 4 |
| Power Plug | 3 ‐ prong IEC Appliance Connector C14 |
Displays/User Interface
| Power On/Off Switch |
| 4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen Monitoring for Frequency vs. Time, Power vs. Time, and more |
Facilities Requirements
| N2 or CDA supply | 1‐2 psi @ 1/4 scfm |
Mini‐Meg 100 Tank
PVDF Tank Mechanical Specifications
| Size: Outside Dimensions Inside Dimensions | Width Length Height 8.75” x 9.50” x 9.55” 6.75” x 7.50” x 5.80” |
| Material of Construction | PVDF Plastic |
| Drain Port | PVDF Drain 1/2″ NPT |
Stainless Steel Tank Mechanical Specifications
| Size: Outside Dimensions Inside Dimensions | Width Length Height 8.75” x 10.58” x 10.51” 6.75” x 7.50” x 5.81” |
| Material of Construction | Electro Polished Stainless Steel PFA Coated Stainless (+$500) |
| Drain Port | SS drain with 1/2” ball valve |
Quartz Tank Mechanical Specifications
| Size: Outside Dimensions Inside Dimensions | Width Length Height 8.75” x 9.75” x 10.25” 5.5” x 6.50” x 5.81” |
| Material of Construction | Quartz with plastic housing |
| Drain Port (Optional) | drain with 1/2” ball valve (+$295) |
