PCT manufactures bulkhead mounted megasonic transducer assemblies in Halar or Tefzel coated aluminum and stainless steel with frequencies from 450 KHz to 2.2 MHz. Our Direct Bond & Indirect transfer transducer assemblies are available with a wide variety of process tanks and constant temperature baths. We can build the tank and transducers to your specifications or we can design a custom bulkhead mount transducer assembly for your existing tank.

Because PCT’s technology allows for multiplexed operation, our transducer assemblies can be mounted in vertically in the sidewall of a tank allowing for greater design flexibility with larger substrates or complex geometry parts. Transducer assemblies come in standard wafer sizes (100mm, 150mm, 200mm, 300mm and 450mm) — plus custom sizes.

Megasonics Generator

Model 6000 Series Generator

Megasonic performance starts with the generator and not all generators are created equal. Simply put, PCT offers the most versatile and fully featured megasonic generators on the market. PCT has pioneered and developed the leading megasonic technology available in the global market with numerous patents and pending applications. Customers around the world have come to depend on PCT for the highest quality and performance megasonic systems today. With the development of super fine geometries with more fragile structures and substrates, customers need more process development options than ever before to be successful, productive and profitable. HyperClean™ incorporates PCT’s unique energy-transfer technology for superior submicron cleaning, reduced operating costs and high reliability.

• Product Details

Unmatched Process Control & Flexibility

No matter what the application, PCTHYPERCLEAN™ Megasonic Generators havebecome the standard by which others are measured.No other manufacturer’s generators are able to drivevirtually any make megasonic transducer array. Sowhether a new system or replacement generator isneeded, PCT can provide Process improvement withour patented HYPERCLEAN™ technology.PCT Systems, Inc. offers complete HYPERCLEAN™Megasonic Systems including a wide tank selectionof quartz, plastics and stainless steel for any sizeapplication or substrate. Customizable transducerarrays in either direct bond or indirect transferconfigurations to offer an unequalled selection forusers to optimize their systems.

DOWNLOAD DATA SHEET

• Multiplexing operation for 2-8 transducers per output.
• Optional embedded temperature controller for heaters
• Individually Configurable and Tunable for Optimum Process Results
• Programmable RF Output Range up to 350 Watts per Channel
• 2 Independent Channels with 8 outputs per Channel
• Synchronized or Individual Control of Each Channel
• Patented Multiplexing for On/Off Control of Individual Transducers
• Process Variables and Real Time Data Monitoring
• Multiple Frequency Bands Individually Controlled
  (600 kHz – 1 MHz)

Dimension	Model 6000 Series Generator
Width	14.0”
Length	14.0”
Height	7.0”
Megasonic Amplifier Operation
Controller	Multiplexing operation for 2-8 transducers per output. Optional embedded temperature controller for heaters.
Number of Channels	2
Number of Outputs per Channel	8
Maximum RF Output/Channel	350 watts
Maximum RF Output per Unit	–
Programmable RF Output Range	0 to 350 watts per Channel
Programmable Recipes / Channel	–
Frequency Changes / Recipe	–
RF Output Power Tolerance	+/- 10%
Frequency Bands	600Khz-1MHz
Mechanical Specifications
Voltage Rating	208-240 VAC, 50/60 Hz
Current Rating	Max 10 amps non-heated (Max 30 amps heated with Model 6000)
Environmental Operating Range	0° to 27°C Operating Range, -25° to 50°C Storage Temperature Range
Frequency Resolution	100 Hz
Frequency Accuracy	+/- 100 Hz
Programmable Sweep Functionality	1-10 KHz
RF Output Connectors	DB15F
External Interface
External Interface	DB15 Male Connector, +5v Loopback – Pin 10, Liquid Level – Pin 4, Ground – Pin 8, 9, 12,
Communication Ports	SECS II: RS232: DB15 Male connector, Receive – Pin 6, Transmit – Pin 7,
Transducer Connections	DB15 Female connectors for each array/channel
Displays/User Interface/Data Storage
Display	4 Line 40 Character LCD with keypad or PDA/LCD Touch Screen Monitoring for Frequency vs. Time, Power vs. Time, and more
Data Storage Capacity	2 GB
Data Export	XML Format